Wet bech #1
|Batch sizes||100 mm: 25, 150 mm: 25|
List or range of wafer diameters the tool can accept
|100 mm, 150 mm|
Types of wafers this equipment can accept
|1-flat, 2-flat, notched, no-flat|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|quartz (fused silica), fused silica, silicon, silicon on insulator|
List or range of wafer thicknesses the tool can accept
|300 .. 1000 µm|