Viscous flow reactor |
|
|---|---|
| Model | |
| Type | custom |
| Equipment Characteristics | |
| MOS clean | no |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
1 .. 150 mm |
| Piece geometry Geometry of wafer pieces the equipment can accept |
triangular shard, other, rectangular, irregular, circular |
| Piece thickness Range of wafer piece thickness the equipment can accept |
100 .. 1000 µm |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
fused silica, silicon on insulator, alumina, silicon, polycarbonate |