MTI BCB coater

Alternate Name BCB coater
Manufacturer Machine Technology, Inc.
Model MultiFab Sys.
Type commercial
Equipment Characteristics
Batch sizes 100 mm: 10, 125 mm: 10, 150 mm: 10
MOS clean no
Wafer diameter(s)
List or range of wafer diameters the tool can accept
100 .. 150 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat, notched, no-flat
Wafer holder
Device that holds the wafers during processing.
plastic chuck
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon, sapphire, quartz (single crystal), silicon germanium, Foturan (Schott), quartz (fused silica), fused silica, ceramic, glass-ceramic, silicon on insulator, alumina, glass (Hoya), silicon on sapphire, Corning 1737, Borofloat (Schott), Pyrex (Corning 7740), silicon carbide
Wafer thickness
List or range of wafer thicknesses the tool can accept
300 .. 1100 µm