AMRAY 3600 Field Emission SEM

Model
Type commercial
Comments
  • Multiple-sample holder can hold up to 15 small pieces.
  • Has a Noran System 6 energy dispersive x-ray detection system for elemental analysis.
Equipment Characteristics
Batch sizes 100 mm: 1, 125 mm: 1, 150 mm: 1, 200 mm: 1
Piece dimension
Range of wafer piece dimensions the equipment can accept
0 .. 8 inch
Piece geometry
Geometry of wafer pieces the equipment can accept
circular, irregular, other, rectangular, triangular shard
Piece thickness
Range of wafer piece thickness the equipment can accept
0 .. 1 inch
Wafer diameter(s)
List or range of wafer diameters the tool can accept
100 mm, 125 mm, 150 mm, 200 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat, no-flat, notched
Wafer holder
Device that holds the wafers during processing.
aluminum chuck
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
alumina, BK7, Borofloat (Schott), ceramic, copper, Corning 1737, Foturan (Schott), fused silica, gallium arsenide, gallium phosphide, germanium, glass (Hoya), glass-ceramic, indium phosphide, lithium niobate, other, Pyrex (Corning 7740), quartz (fused silica), quartz (single crystal), sapphire, silicon, silicon carbide, silicon germanium, silicon on insulator, silicon on sapphire, titanium
Wafer thickness
List or range of wafer thicknesses the tool can accept
0 .. 1 inch