Wet Bench (acid) |
|
|---|---|
| Alternate Name | Wet Bench |
| Manufacturer | |
| Model | |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 25, 150 mm: 25, 75 mm: 25 |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
0 .. 100 mm |
| Piece geometry Geometry of wafer pieces the equipment can accept |
triangular shard, other, rectangular, irregular, circular |
| Piece thickness Range of wafer piece thickness the equipment can accept |
300 .. 800 µm |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
75 mm, 100 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer holder Device that holds the wafers during processing. |
teflon carrier |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 800 µm |