Metron 3290

Alternate Name Varian 3290
Manufacturer Varian / Metron
Model 3290
Type commercial
Equipment Characteristics
Batch sizes 100 mm: 1, 150 mm: 1, 75 mm: 1
Piece dimension
Range of wafer piece dimensions the equipment can accept
0 .. 75 mm
Wafer diameter(s)
List or range of wafer diameters the tool can accept
75 .. 150 mm
Wafer holder
Device that holds the wafers during processing.
aluminum chuck
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
quartz (fused silica), silicon, silicon on insulator