Varian 3190 DC magnetron sputterrer |
|
|---|---|
| Model | 3190 |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 1, 125 mm: 1, 25 mm: 9, 50 mm: 3, 75 mm: 1 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, no-flat |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, silicon on insulator, quartz (fused silica) |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 1000 µm |
