GSI Ultradep 1000 |
|
|---|---|
| Model | Ultradep 1000 |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 3, 150 mm: 1 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm, 150 mm |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
Pyrex (Corning 7740), quartz (fused silica), silicon, silicon on insulator |