GCA Autostep 200 DSW Stepper

Model Autostep 200 DSW
Type commercial
Equipment Characteristics
Batch sizes 100 mm: 1, 150 mm: 1, 200 mm: 1
Wafer diameter(s)
List or range of wafer diameters the tool can accept
100 mm, 150 mm, 200 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat, notched
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
Pyrex (Corning 7740), quartz (fused silica), silicon, silicon on insulator
Wafer thickness
List or range of wafer thicknesses the tool can accept
300 .. 1000 µm