Varian XM8 Sputterer

Alternate Name Varian XM8
Manufacturer Novellus
Model XM8
Type commercial
  • Capable of sputtering titanium, aluminum, and copper. RF etch is also available.
Equipment Characteristics
Batch sizes 100 mm: 1, 125 mm: 1, 150 mm: 1, 50 mm: 1, 75 mm: 1
MOS clean no
Wafer diameter(s)
List or range of wafer diameters the tool can accept
50 mm, 75 mm, 100 mm, 125 mm, 150 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat, no-flat, notched
Wafer holder
Device that holds the wafers during processing.
stainless steel
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
alumina, BK7, Borofloat (Schott), ceramic, copper, Corning 1737, Foturan (Schott), fused silica, gallium arsenide, gallium phosphide, germanium, glass (Hoya), glass-ceramic, indium phosphide, lithium niobate, other, Pyrex (Corning 7740), quartz (fused silica), quartz (single crystal), sapphire, silicon, silicon carbide, silicon germanium, silicon on insulator, silicon on sapphire, titanium
Wafer thickness
List or range of wafer thicknesses the tool can accept
300 .. 2000 µm