Lindberg/Blue M mechanical oven |
|
|---|---|
| Model | |
| Type | |
| Equipment Characteristics | |
| Batch sizes | 25 .. 150 mm: 24 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
25 mm, 50 mm, 75 mm, 100 mm, 125 mm, 150 mm |
| Wafer holder Device that holds the wafers during processing. |
quartz boat |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, glass (category) |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 800 µm |
