Interserv PG |
|
|---|---|
| Model | |
| Type | |
| Equipment Characteristics | |
| File formats List of CAD file formats supported (eg. GDSII, CIF) |
gdsII |
| Mask coating Mask coating material (eg. chrome). |
chromium |
| Mask plate dimensions Width, length, thickness of the mask plates (eg. 5x7x0.09 inch). |
4x4x0.09 inch, 5x5x0.09 inch |
| Mask polarity Polarity of the mask. |
positive |
| Max aperture size Size of pattern generator's maximum aperture (e.g., 1 mm) |
380x380 um |
| Max field size | 127 mm |
| Min aperture size Size of pattern generator's minimum aperture (e.g., 2 um) |
1x1 um |