Axcelis Down Stream Plasma Asher / Stripper

Model 200 ES
Type commercial
Equipment Characteristics
Batch sizes 100 mm: 25, 150 mm: 25
Wafer diameter(s)
List or range of wafer diameters the tool can accept
100 mm, 150 mm
Wafer holder
Device that holds the wafers during processing.
cassette
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
silicon on insulator, sapphire, quartz (fused silica), silicon
Wafer thickness
List or range of wafer thicknesses the tool can accept
250 .. 800 µm