Headway Programmable Photoresist Spinner |
|
|---|---|
| Alternate Name | Photoresist Spinner |
| Manufacturer | Headway Research |
| Model | PWM32 |
| Type | commercial |
| Equipment Characteristics | |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
1 .. 6 inch |
| Piece geometry Geometry of wafer pieces the equipment can accept |
circular, irregular, other, rectangular |
| Piece thickness Range of wafer piece thickness the equipment can accept |
200 .. 800 µm |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
gallium arsenide, glass (category), other, silicon |
