UV Photostabilizer System |
|
|---|---|
| Alternate Name | UVBAKE |
| Manufacturer | |
| Model | Fusion M150PC |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 25, 150 mm: 25 |
| MOS clean | no |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, no-flat, notched |
| Wafer holder Device that holds the wafers during processing. |
heated plate |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, silicon germanium, silicon on insulator |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 1000 µm |