Wet etch bench |
|
|---|---|
| Model | |
| Type | commercial |
| Equipment Characteristics | |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
1 .. 150 mm |
| Piece geometry Geometry of wafer pieces the equipment can accept |
rectangular |
| Piece thickness Range of wafer piece thickness the equipment can accept |
200 .. 1000 µm |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm, 150 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat |
| Wafer holder Device that holds the wafers during processing. |
teflon boat, teflon carrier |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
quartz (fused silica), Pyrex (Corning 7740), silicon on insulator, silicon, ceramic |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 1000 µm |