Critical point dryer |
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|---|---|
| Model | Autosamdri-915B |
| Type | commercial |
| Comments | |
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| Equipment Characteristics | |
| Batch sizes | 100 mm: 5, 150 mm: 5, 50 mm: 5, 75 mm: 5 |
| Die area Die area the equipment can accept |
1 cm2 |
| Die dimension Characteristic dimension of dies (e.g., side length of square) the equipment can accept |
1 cm |
| Die materials List of allowed materials for dies accepted by this equipment |
silicon, silicon on insulator |
| Die thickness List or range of die thicknesses the tool can accept |
200 .. 600 µm |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
50 mm, 75 mm, 100 mm, 150 mm |
| Wafer geometry Types of wafers this equipment can accept |
no-flat, 1-flat, 2-flat, notched |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, silicon on insulator |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 600 m |