Wetbench |
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|---|---|
| Model | |
| Type | commercial |
| Comments | |
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| Equipment Characteristics | |
| Batch sizes | 0 .. 200 mm: 1 |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
0 .. 4 inch |
| Piece geometry Geometry of wafer pieces the equipment can accept |
triangular shard, other, rectangular, irregular, circular |
| Piece thickness Range of wafer piece thickness the equipment can accept |
100 .. 1000 µm |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
75 mm, 100 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer holder Device that holds the wafers during processing. |
teflon carrier |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
100 .. 1000 µm |