MTI Multi-Fab Coater |
|
|---|---|
| Model | |
| Type | |
| Equipment Characteristics | |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm |
| Wafer holder Device that holds the wafers during processing. |
vacuum chuck |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, silicon on insulator, silicon germanium, gallium arsenide |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
505 .. 545 µm |