CHA e-Beam Vacuum Evaporator System |
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|---|---|
| Alternate Name | e-Beam Evaporator |
| Manufacturer | CHA Industries |
| Model | SEC 600 |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 8, 150 mm: 5, 75 mm: 8 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
75 .. 150 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer holder Device that holds the wafers during processing. |
mechanical clamp |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
quartz (fused silica), sapphire, gallium arsenide, silicon, silicon on insulator |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 800 µm |
| Attachments | |
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