SJ-20 evaporator

Model SJ-20
Type commercial
Equipment Characteristics
Batch sizes 100 mm: 8, 50 mm: 8, 75 mm: 8
Wafer diameter(s)
List or range of wafer diameters the tool can accept
50 mm, 75 mm, 100 mm
Wafer geometry
Types of wafers this equipment can accept
1-flat, 2-flat, no-flat, notched
Wafer holder
Device that holds the wafers during processing.
rotating orbital
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
gallium arsenide, glass (category), indium phosphide, Pyrex (Corning 7740), quartz (fused silica), silicon
Wafer thickness
List or range of wafer thicknesses the tool can accept
200 .. 1000 µm