Clean 100 Photoresist Bake Oven |
|
|---|---|
| Alternate Name | Resist Bake Oven |
| Manufacturer | |
| Model | |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 4, 150 mm: 3, 50 mm: 8, 75 mm: 4 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
50 .. 150 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, no-flat, notched |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
other |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 800 µm |
