Phi 5600 ESCA system |
|
|---|---|
| Alternate Name | XPS |
| Manufacturer | Phi |
| Model | 5600 |
| Type | commercial |
| Equipment Characteristics | |
| MOS clean | no |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
0 .. 25 mm |
| Piece geometry Geometry of wafer pieces the equipment can accept |
circular, irregular, other, rectangular, triangular shard |
| Piece thickness Range of wafer piece thickness the equipment can accept |
0 .. 2 mm |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
alumina, BK7, Borofloat (Schott), ceramic, copper, Corning 1737, Foturan (Schott), fused silica, gallium arsenide, gallium phosphide, germanium, glass (Hoya), glass-ceramic, indium phosphide, lithium niobate, other, Pyrex (Corning 7740), quartz (fused silica), quartz (single crystal), sapphire, silicon, silicon carbide, silicon germanium, silicon on insulator, silicon on sapphire, titanium |