Solvent Bench I |
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|---|---|
| Model | Custom |
| Type | commercial |
| Comments | |
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| Equipment Characteristics | |
| Batch sizes | 100 mm: 1, 125 mm: 1, 150 mm: 1, 175 mm: 1 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm, 125 mm, 150 mm, 175 mm |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
glass (category) |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 1100 µm |