Leitz Ergolux Microscope
|Batch sizes||100 mm: 1, 150 mm: 1, 50 mm: 1, 75 mm: 1|
Geometry of wafer pieces the equipment can accept
|circular, irregular, other, rectangular, triangular shard|
List or range of wafer diameters the tool can accept
|75 .. 150 mm|
Types of wafers this equipment can accept
|1-flat, 2-flat, no-flat, notched|
Device that holds the wafers during processing.
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
|gallium arsenide, gallium phosphide, indium phosphide, Pyrex (Corning 7740), quartz (fused silica), quartz (single crystal), sapphire, silicon, silicon carbide, silicon on insulator|