Woollam Spectroscopic Ellipsometer |
|
|---|---|
| Alternate Name | Ellipsometer |
| Manufacturer | Woollam |
| Model | M-2000F |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 50 .. 150 mm: 1 |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
50 .. 150 mm |
| Piece geometry Geometry of wafer pieces the equipment can accept |
circular, irregular, other, rectangular |
| Piece thickness Range of wafer piece thickness the equipment can accept |
200 .. 700 µm |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
50 mm, 75 mm, 100 mm, 125 mm, 150 mm |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, silicon on insulator |
