Headway Manual Spinner |
|
|---|---|
| Alternate Name | photoresist spinner |
| Manufacturer | Headway Research |
| Model | |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 1, 150 mm: 1, 200 mm: 1, 50 mm: 1, 75 mm: 1 |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
0 .. 75 mm |
| Piece geometry Geometry of wafer pieces the equipment can accept |
other, rectangular, irregular, circular |
| Piece thickness Range of wafer piece thickness the equipment can accept |
200 .. 2500 µm |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
75 .. 150 mm |
| Wafer holder Device that holds the wafers during processing. |
aluminum chuck |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
gallium arsenide, other, quartz (single crystal), silicon, silicon carbide, indium phosphide, sapphire, silicon on insulator, Pyrex (Corning 7740), quartz (fused silica) |