Tencor Alpha-step |
|
|---|---|
| Model | Alpha-step 250 |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 0 .. 150 mm: 1 |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
1 .. 150 mm |
| Piece geometry Geometry of wafer pieces the equipment can accept |
circular, irregular, other, rectangular, triangular shard |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
0 .. 150 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, no-flat |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
glass (category), silicon, silicon on insulator |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 2000 µm |