Process Hierarchy

Process
Silicon dioxide PECVD (PlasmaTherm 790)
Silicon dioxide PECVD (Unaxis VLR 700)
Silicon nitride PECVD (PlasmaTherm 790)
Silicon nitride PECVD (Unaxis VLR 700)
Silicon dioxide PECVD
Silicon nitride PECVD
Silicon dioxide PECVD
Silicon dioxide PECVD
Silicon nitride PECVD
Silicon Dioxide PECVD PlasmaTherm 790
Silicon Nitride PECVD PlasmaTherm 790
Silicon dioxide VLR700 PECVD
Silicon nitride PECVD (Unaxis VLR 700)
Amorphous silicon PECVD
Silicon dioxide PECVD (TEOS)
Silicon nitride PECVD
Silicon Nitride PECVD (STS)
Silicon dioxide PECVD (STS)
TEOS PECVD (STS)
Silicon dioxide PECVD (TEOS)
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