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5X i-line photolithography (image reversal): View
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Contact mask lithography
Maskless lithography
Miscellaneous lithography
Projection mask lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at
engineering@mems-exchange.org
or call us at (703) 262-5368
on front
5X i-line photolithography (image reversal)
Down
1
HMDS Vapor Prime
on front
2
Photoresist Spin Coat ACS200 (AZ 5214E)
3
Photoresist Softbake ACS200
4
5x i-line step & expose
5
Photoresist Softbake ACS200
6
Flood Expose
7
Photoresist Develop (5214E)
8
Linewidth Microscope Measurement
Process characteristics:
Alignment tolerance
Registration of CAD data to features on wafer
Alignment tolerance
*
µm
Registration of CAD data to features on wafer, must be 0.3 .. 5 µm
0.3 .. 5 µm
Min feature size
Minimum feature size in the design that will be written on the wafer. (the corresponding feature size on the mask should be 5 times larger.)
Min feature size
*
µm
Minimum feature size in the design that will be written on the wafer. (the corresponding feature size on the mask should be 5 times larger.) , must be 0.8 .. 10 µm
0.8 .. 10 µm
Perform edge bead removal
Perform edge bead removal
*
yes
no
Perform linewidth metrology
Two measurement per wafer
Perform linewidth metrology
*
yes
no
Two measurement per wafer
Perform microscope inspection
30 mins inspection per wafer
Perform microscope inspection
*
yes
no
30 mins inspection per wafer
Perform stylus profilometry
One measurement per wafer, for features >40um in width.
Perform stylus profilometry
*
yes
no
One measurement per wafer, for features >40um in width.
Resist thickness
Resist thickness
*
1.4 um
1.5 um
1.8 um
2.1 um
Batch size
1
Design size
Size of design on mask
15.5 mm
Magnification
5
Perform hardbake
none
Wafer size
Wafer size
100 mm
150 mm