MEMS and Nanotechnology ExchangeThe MEMS and Nanotechnology Exchange has deployed fully automated and remotely controllable semiconductor inspection microscopes, letting MEMS designers view their wafers after critical processing steps from any location having an Internet connection. We currently have 5 Remote Microscopes deployed at 4 different fab sites, and one at the MEMS and Nanotechnology Exchange's offices in Reston, Virginia.
The system consists of an optical microscope (currently a Leica INM200 or INS1000) and a server which controls the microscope. Users simply run a web browser to access the microscope.