MEMS and Nanotechnology Exchange
When you select a process to add to your run, whether it is a
modular process, a
base process, or an
uncharacterized process,
you'll need to provide some details about exactly how you want the
process to be used. Most processes have one or two input
properties information that you should supply when you add the
step. For example, most deposition processes have an input property
Thickness, and most etch processes have Depth as an
input property.
- Out-of-spec input properties
-
For numeric input properties, the fab may supply constraints. For
example, a process might be able to deposit
0 .. 2 µm of polysilicon. If you wanted to
deposit 3 µm, a value that falls outside of the specified
constraint, a warning will be displayed. You may enter values that
are outside of the allowed range, or out-of-spec values, if
you explicitly confirm that that is what you meant to say when the
warning appears. The fab may or may not be able to carry out the
process you requested; we'll ask them for you.