MEMS and Nanotechnology ExchangeSun Ultra10 |
|
|---|---|
| Model | |
| Type | commercial |
| Equipment Characteristics | |
| Die area Die area the equipment can accept |
0.1 .. 20 cm2 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
25 .. 200 mm |
| Attachments | |