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Fusion bonding: Page 1 of 1
Process Hierarchy
Bonding
   Anodic bonding
   Fusion bonding
   Glass frit bonding
   Miscellaneous bonding
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Consulting
Deposition
Doping
Etch
LIGA
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Thermal
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Fusion bonding

The substrates are first forced into intimate contact by applying a high contact force. Once in contact the substrates hold together due to atomic attraction forces (Van der Waal), which are strong enough to allow the bonded substrates to be handled. The substrates are then placed in a furnace and annealed at high temperature, after which a solid bond is formed between the substrates.
Process