Attached files

SOG_design_rules_v2_03-19-07.pdf (799.2 KB, application/pdf): attached by ozgur (Mehmet Ozgur) on 2007-04-23 14:14; Revised design rules
sog_lr.jpg (165.7 KB, image/jpeg): attached by ozgur (Mehmet Ozgur) on 2005-09-28 18:00; SOG-MEMS process flow
sog3.png (591.0 KB, image/png): attached by ozgur (Mehmet Ozgur) on 2005-09-28 18:00; 3D view of a SOF-MEMS device
sog2.png (61.5 KB, image/png): attached by ozgur (Mehmet Ozgur) on 2005-09-28 18:00; SEM image of SOG-MEMS devices
sog1.png (79.3 KB, image/png): attached by ozgur (Mehmet Ozgur) on 2005-09-28 18:00; Description of SOG-MEMS device