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Attached files
sog1.png
(79.3 KB, image/png)
Description of SOG-MEMS device
sog2.png
(61.5 KB, image/png)
SEM image of SOG-MEMS devices
sog3.png
(591.0 KB, image/png)
3D view of a SOF-MEMS device
sog_lr.jpg
(165.7 KB, image/jpeg)
SOG-MEMS process flow
SOG_design_rules_v2_03-19-07.pdf
(799.2 KB, application/pdf)
Revised design rules