Attached files

MEMS and Nanotechnology Exchange

sog1.png (79.3 KB, image/png): Description of SOG-MEMS device
sog2.png (61.5 KB, image/png): SEM image of SOG-MEMS devices
sog3.png (591.0 KB, image/png): 3D view of a SOF-MEMS device
sog_lr.jpg (165.7 KB, image/jpeg): SOG-MEMS process flow
SOG_design_rules_v2_03-19-07.pdf (799.2 KB, application/pdf): Revised design rules