SOG_design_rules_v2_03-19-07.pdf (799.2 KB, application/pdf)
attached by ozgur (Mehmet Ozgur) on 2007-04-23 14:14
Revised design rules
[Thumbnail]sog_lr.jpg (165.7 KB, image/jpeg)
attached by ozgur (Mehmet Ozgur) on 2005-09-28 18:00
SOG-MEMS process flow
[Thumbnail]sog3.png (591.0 KB, image/png)
attached by ozgur (Mehmet Ozgur) on 2005-09-28 18:00
3D view of a SOF-MEMS device
[Thumbnail]sog2.png (61.5 KB, image/png)
attached by ozgur (Mehmet Ozgur) on 2005-09-28 18:00
SEM image of SOG-MEMS devices
[Thumbnail]sog1.png (79.3 KB, image/png)
attached by ozgur (Mehmet Ozgur) on 2005-09-28 18:00
Description of SOG-MEMS device