Sheet resistance measurement: View

on front Sheet resistance measurement

Current

1e-06 .. 0.2 A

Materials

silicon (doped), metal (category)

Sheet resistance

0.005 .. 1e+06 Ω/square

Sides processed

either

Voltage

1e-06 .. 1 V

Wafer size

Equipment

Equipment characteristics:

Batch sizes

150 mm: 25

Wafer geometry

Types of wafers this equipment can accept

1-flat, 2-flat, notched, no-flat

Wafer materials

List of wafer materials this tool can accept (not list of all materials, just the wafer itself).

silicon on insulator, silicon

Wafer thickness

List or range of wafer thicknesses the tool can accept

300 .. 675 µm