MEMS and Nanotechnology Exchange
aMEMS Design Handbook v10.pdf (831.2 KB, application/pdf)![[Thumbnail]](6dce0ffab0ce/thumbnail?50)
amems_1.png (23.3 KB, image/png)- Cross-sectional view of thin layers. Film thicknesses are as follows:
aluminum : 0.5um (Mask #2: STRUCTURE)
silicon : 20um (Mask #2: STRUCTURE)
Oxide: 1.6um (Mask #1: BRIDGE)
Bond Layer: 20um
![[Thumbnail]](e6ee0aac575a/thumbnail?50)
amems_3.png (119.5 KB, image/png)- Process flow