[Thumbnail]amems_3.png (119.5 KB, image/png)
attached by ozgur (Mehmet Ozgur) on 2005-08-18 11:00
Process flow
[Thumbnail]amems_1.png (23.3 KB, image/png)
attached by ozgur (Mehmet Ozgur) on 2005-08-17 17:34
Cross-sectional view of thin layers. Film thicknesses are as follows: aluminum : 0.5um (Mask #2: STRUCTURE) silicon : 20um (Mask #2: STRUCTURE) Oxide: 1.6um (Mask #1: BRIDGE) Bond Layer: 20um
aMEMS Design Handbook v10.pdf (831.2 KB, application/pdf)
attached by ozgur (Mehmet Ozgur) on 2005-08-17 15:58