amems_3.png(119.5 KB, image/png)- attached by ozgur (Mehmet Ozgur) on 2005-08-18 11:00
- Process flow
amems_1.png(23.3 KB, image/png)- attached by ozgur (Mehmet Ozgur) on 2005-08-17 17:34
- Cross-sectional view of thin layers. Film thicknesses are as follows: aluminum : 0.5um (Mask #2: STRUCTURE) silicon : 20um (Mask #2: STRUCTURE) Oxide: 1.6um (Mask #1: BRIDGE) Bond Layer: 20um
aMEMS Design Handbook v10.pdf(831.2 KB, application/pdf)- attached by ozgur (Mehmet Ozgur) on 2005-08-17 15:58
amems_3.png(119.5 KB, image/png)amems_1.png(23.3 KB, image/png)
