MEMS and Nanotechnology Exchange
aMEMS Design Handbook v10.pdf (831.2 KB, application/pdf)
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- Cross-sectional view of thin layers. Film thicknesses are as follows:
aluminum : 0.5um (Mask #2: STRUCTURE)
silicon : 20um (Mask #2: STRUCTURE)
Oxide: 1.6um (Mask #1: BRIDGE)
Bond Layer: 20um
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amems_3.png (119.5 KB, image/png)
- Process flow