MEMS and Nanotechnology Exchange
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profile_before_device_etch_silicon_wafer_.tif (768.6 KB, image/tiff)- Last test on standard test wafer. Following tests were made on SOI wafer /wafer: test poly 2/
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profile_before_device_etch_1_SOI_wafer_.tif (768.6 KB, image/tiff)- last SOI test measuring point 1 /wafer: test SOI 1/
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profile_before_device_etch_2_SOI_wafer_.tif (768.6 KB, image/tiff)- last SOI test measuring point 2 /wafer: test SOI 1/
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profile_before_device_etch_3_SOI_wafer_.tif (768.6 KB, image/tiff)- last SOI test measuring point 3 /wafer: test SOI 1/