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Anodic bonding (vacuum, with alignment): View
Process Hierarchy
Bonding
   Anodic bonding
   Fusion bonding
   Glass frit bonding
   Miscellaneous bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368

Anodic bonding (vacuum, with alignment)
Alignment type
Method used to align materials to be bonded.
optical
Batch size 2
Bonded materials
Pair of materials bonded by this process
silicon, Pyrex (Corning 7740), glass (Hoya)
Pressure
Pressure of process chamber during processing
0.1 mTorr
Wafer size
Wafer size