on front Maskless Exposure |
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| Field geometry Shape of field with dimensions characterized by the maximum field size |
square |
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| Max field size |
25 mm |
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| Min feature size |
5 µm |
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| Sides processed |
either |
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| Wafer size |
|
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| Equipment |
IMP SF-100 |
| Equipment characteristics: |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
10 .. 200 mm |
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| Piece geometry Geometry of wafer pieces the equipment can accept |
rectangular, circular, triangular shard, irregular, other |
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| Piece thickness Range of wafer piece thickness the equipment can accept |
100 .. 2000 µm |
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| Wafer geometry Types of wafers this equipment can accept |
no-flat, 1-flat, 2-flat, notched |
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| Wafer holder Device that holds the wafers during processing. |
metal chuck |
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| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
glass (category), Pyrex (Corning 7740), quartz (single crystal), silicon |
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| Wafer thickness List or range of wafer thicknesses the tool can accept |
100 .. 2000 µm |
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| Comments: |
|
MEMS and Nanotechnology Exchange