Application of adhesion promoter (MEOPTS): View

Application of adhesion promoter (MEOPTS)

Batch size

Material

97% 3-Methacryloxypropyltriethoxyline

Sides processed

both

Wafer size

Equipment

Equipment characteristics:

Wafer geometry

Types of wafers this equipment can accept

no-flat, 1-flat, 2-flat, notched

Wafer holder

Device that holds the wafers during processing.

teflon

Wafer materials

List of wafer materials this tool can accept (not list of all materials, just the wafer itself).

glass (category), Pyrex (Corning 7740), quartz (single crystal), silicon, silicon on insulator

Wafer thickness

List or range of wafer thicknesses the tool can accept

100 .. 500 µm

Comments:

Deposition from aqueous alcohol solution is the most facile method for preparing silylated surfaces. A 95% ethanol-5% water solution is adjusted to pH 4.5-5.5 with acetic acid. Silane is added with stirring to yield a 2% final concentration. Five minutes should be allowed for hydrolysis and silanol formation. When both sides need to be processed, the sample is dipped into the solution. Cure of the silane layer is for 5-10 minutes at 110oC or 24 hours at room temperature.