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| Material |
SU-8 |
|---|
| Sides processed |
both |
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| Temperature |
96 °C |
|---|
| Thermal duration |
20 min |
|---|
| Wafer size |
|
|---|
| Equipment |
Baking oven |
| Equipment characteristics: |
| Wafer geometry Types of wafers this equipment can accept |
no-flat, 1-flat, 2-flat, notched |
|---|
| Wafer holder Device that holds the wafers during processing. |
aluminum plate |
|---|
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
glass (category), Pyrex (Corning 7740), quartz (single crystal), silicon |
|---|
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 1500 µm |
|---|
MEMS and Nanotechnology Exchange