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Rapid thermal anneal: View
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
   Anneal
   Bake
   Oxidation
Unique capabilities

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368

Rapid thermal anneal
Process characteristics:
Ambient
Preferred annealing environment (if known).
Ambient
Available  
Selected
Preferred annealing environment (if known).
Pressure
Preferred annealing chamber pressure (if known).
Pressure
Preferred annealing chamber pressure (if known).
unconstrained
Process duration
Specify preferred annealing time (if known).
Process duration
Specify preferred annealing time (if known).
unconstrained
Temperature
Preferred annealing temperature (if known).
Temperature
Preferred annealing temperature (if known).
unconstrained
Sides processed both
Equipment
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