on front Photoresist develop (Shipley 3612) |
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| Batch size |
1 |
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| Developer Agent that reacts with masking layer (e.g., photoresist) to etch it selectively. |
LDD 26W |
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| Material |
Shipley 3612 |
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| Process duration |
4 min |
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| Selectivity Primary material removal rate divided by removal rates of secondary materials (i.e., factors by which primary material is removed faster than secondary materials) |
Shipley 3612: 1 |
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| Sides processed |
either |
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| Temperature |
110 °C |
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| Wafer size |
|
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| Equipment |
SVG developer |
| Equipment characteristics: |
| Wafer holder Device that holds the wafers during processing. |
vacuum chuck |
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| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, glass (category), quartz (single crystal), silicon on sapphire, silicon on insulator |
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| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 700 µm |
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MEMS and Nanotechnology Exchange